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Effect of DC bias on properties of C: SiOX film prepared by HMDSO

The C: SiOX film prepared by HMDSO has excellent corrosion resistance. The influence of HMDSO/O2 ratio on the composition, corrosion resistance and hardness of the film was discussed in the last part. In the whole coating process, 

HiPIMS self-organizing discharge high-resolution spectral imaging

Due to the constraint of magnetic field and the ultra-high power discharge, the high-power pulsed magnetron sputtering technology (HiPIMS) has the unstable phenomenon of glow flicker due to the partial discharge enhancement during the discharge process.
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